The FEI XL30 ESEM (Environmental Scanning Electron Microscope) can perform high vacuum, low vacuum and wet modes imaging from 1KV-30KV and 10X-100,000x magnification. It can be used to detect secondary
electrons (SE), backscattered secondary electrons (BSE) in high vacuum SE and gaseous
secondary electrons (GSE).
The XL30 ESEM is equipped with a Peltier stage (0oC to 37oC) and a heating stage (37oC up to 1000oC). Its maximum resolution under optimal conditions is 3.5nm.The XL30 also equipped with Energy Dispersive X-ray Spectroscopy (EDS) through an attached EDAX ultra-thin Beryllium window detector configurable for light
element analysis down to Carbon.