The microfabrication laboratory at the University of Memphis opened in May 2013 and
provides a learning and research environment for students, faculty and industrial
The equipment in the microfabrication lab enables thin film deposition by sputtering,
photolithography and wire bonding. This equipment is housed in a 435 sq. ft. class
1000 cleanroom, which provides an environment in which the concentration of airborne
particles is tightly controlled (<1000 particles 0.5 microns or larger per cubic foot).
In addition other cleanroom environmental parameters, such as temperature, humidity,
and pressure are maintained within specified limits. This tightly controlled cleanroom
environment enables the microfabrication equipment to be used for research and fabrication
processes at the nanoscale level.
Staff in the facility help investigators define optimal experimental conditions for
their microfabrication project. Investigators have the option to request IMC staff
to perform their microfabrication project or to be trained by IMC staff to operate
the microfabrication equipment.