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X-ray Photoelectron Spectrometer (XPS) Contact


Technical Data

  • UHV Condition at better than 2 x 10-9 mbar
  • Maximum sample size of 60×60x20mm
  • X-ray Monochromator:
  • Ag 3d5/2 peak with full width at half-maximum energy resolution of 0.50 eV
  • Spot size of 30µm to 400µm
  • Charge compensation by electrons and low energy ions (Ar+)
  • Ion Gun: <500 µm spot size, 100eV-4keV, 1uA at 200eV
  • Lateral resolution of better than 30 µm for imaging 128 Channel Electron Analyzer Large acceptance angle of >60°
  • 1.0eV (FWHM) on the silver 3d5/2 with a peak height of 2,000,000 cps using an X-ray spot size of  400 µm
  • Angular Resolved XPS for non-destructive depth analysis of thin films
  • Work function measurements capability

Under Construction

Users interested in using the X-ray Photoelectron Spectrometer(XPS) should contact:

Dr. Felio Perez -

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Last Updated: 11/6/13