Nova NanoSEM 650 Features and Specifications

  1. Vacuum System
  2. Sample Navigation
  3. Electron Optics
  4. Scanning System
  5. Detector System
  6. Imaging
  7. System Control
  8. Correlative Workflow
  9. Maps Tiling & Stitching
  10. Remote Access Program for interactive Diagnostics (RAPID)
  11. System Support

1. Vacuum System

The Nova NanoSEM 650 is equipped with a complete oil-free vacuum system, composed of a 220 l/s turbo-molecular pump and one scroll pump. In addition, the gun section is pumped by a two-stage ion-getter pump and separated from the specimen chamber by an isolation valve. Through-the-lens differential pumping enables to use of two specimen chamber vacuum modes: high vacuum and low vacuum. Specimen exchange is within a few minutes by means of a draw-out stage.

The Nova NanoSEM 650 can be freely and simply switched between two vacuum modes enabling the investigation of conductive, non-conductive and high-vacuum incompatible materials:

  • High vacuum (6 x 10'° mbar after 24 hrs pumping) for imaging and microanalysis of conductive and/or conventionally prepared specimens.

  • Low vacuum (< 200 Pa) for imaging and microanalysis of non-conductive specimens without preparation or coating.

2. Sample Navigation

The Nova NanoSEM 650 is equipped with a 5-axes motorized x-y-z-rotate-tilt stage, of which x, y and rotation movements are piezo-controlled.

Movements provided are:

  • x = y = 150 mm (motorized)

  • z = 10 mm- Tilt +60 to -10 degrees (motorized)

  • Minimum step size is 100 nm

  • Repeatability at 0 degrees tilt is 1 um, and 2 um at 52 degrees tilt

Sample holders are provided for single and multiple (Sx) stubs. 

Stage control software includes standard facilities for:

  • Store and recall of sample position

  • Double-click feature select function

  • Multi-directional stage drive

  • Compucentric rotation

3. Electron Optics

The Nova NanoSEM 650 features:

  • The NSFEG gun, a high stability ultra-high brightness FE electron source with high beam current capability.

  • A two-mode final lens, allowing for immersion and field-free operation. The field-free mode ensures undistorted, very low magnification imaging. In immersion mode, the highest resolution is achieved.

  • Beam deceleration, which can be activated for getting higher surface sensitivity and contrast using low and very low landing energies. Beam deceleration is implemented as an additional degree of freedom to optimize contrast and surface sensitivity while improving the optical performance of the electron column.

  • Source FEG with ultra-high brightness Schottky field emitter

  • Voltage High voltage 200 V to 30 xv, continuously adjustable

  • Landing energy 20 V to 30 kV, continuously adjustable

  • Beam current Up to 200 nA 

  • Resolution High-vacuum imaging, optimum working distance:

  • 0.8 nm at 30 kV (STEM)

  • 1.0 nm at 15 kV (TLD-SE)

  • 1.4 nm at 1 kV (TLD-SE without beam deceleration; requires a Plasma Cleaner)

  • 3.5 nm at 100 V (OBS)

  • High vacuum analysis, analytical working distance:

  • 3.0 nm at 15 kV and 5 nA (TLD-SE)

Low-vacuum imaging, optimum working distance:

  • 1.5 nm at 10 kV (Helix detector)

  • 1.8 nm at 3 kV (Helix detector)

  • Focus Range Mode l (magnetic lens): 1 mm to 60 mm

  • Mode ll (immersion lens): 1 mm to 7 mm (1 RV)

  • Minimum magnification:

  • at 5 mm WD: 32x (Polaroid) corresponding to a 4 mm Horizontal Field Width

  • at 10 mm WD: 29x (Polaroid) corresponding to a 4.4 mm Horizontal Field Width

4. Scanning System

The NNS x50 provides a flexible scanning system controlled from the graphical user interface:

  • Pixel density 768 x 512, 1536 x 1024, 3072 x 2048 or 6144 x 4096, selectable

  • Minimum dwell time 50 ns/pixel; maximum 25 ms/pixel

  • Electronic scan rotation by n x 360 degrees

  • SmartSCAN*" scan settings can be used to minimize noise

5. Detector Systems

The Nova NanoSEM 650 features in-lens (TLD) SE and BSE detection for high-resolution imaging at both high and low kV's, as well as an Everhart-Thornley SE detector for conventional SE detection. The balanced field extraction system of this in- the-lens detector allows continuous mixing of SE and BSE electrons. This TLD system allows TV rate BSE imaging to an accelerating voltage of 1 kV.

For imaging of non-conductive or contaminating samples, the system is equipped with a unique Low Vacuum Secondary Electron Detector (LVD) which enables imaging in low vacuum at low high-tension values, giving maximum surface information and minimal contamination.

Optionally for backscatter imaging, the system can be equipped with a high-sensitivity, high-speed DBS detector for low voltage imaging in beam deceleration mode or a Gaseous Analytical detector for optimized BSE imaging and EDS analysis in low-vacuum mode. A STEM detector is also available as options for imaging of TEM prepared samples.

An IR-CCD camera is standard included; when in operation, its output can be displayed simultaneously with electron images in both high- and low-vacuum modes.

6. Imaging

Images are displayed in an area of 1536 x 1024 pixels, configurable for either single-frame or four-quadrant display. Additionally, if a second monitor is present, the “Large Image Window" function can be configured to display a full screen image on the second monitor from any of the available 4 quadrant display signals. Image scan be viewed live, averaged or integrated. The Nova NanoSEM fully supports the FEI SmartSCAN"" advanced scanning behavior which allows line averaging and interlaced scanning in addition to Drift Corrected Frame integration (DCFI). Still images can be saved in TIFF, BMP, JPEG file formats, and in 8-bit. 16-bit or 24-bit depth, to the hard disk or LAN from the graphical user interface. Image printing is also available from the userinterface. In addition, the system supports recording of AVI movies. This can either be done on the fly or by capturing a series of TIFF images at user-specified intervals. These TIFF images can then be combined into AVl's by using the included proprietary FEI movie creator software.

The software includes a 4-quad mode, in which the quadrants can be used for live display of electron images(SE, optional BSE, etc.), mixing of signals and display of the image of the standard infra red (IR-CCD) camera,standard navigation montage or optional color Nav-Cam.

Look-up tables allow image contrast, brightness or gamma to be enhanced. Flexible databar selection is also provided. User-definition of preferred imaging parameter sets is available. imaging parameters are stored in the TIFF image file as private data. Finally, image measurements and annotations can be done live on the image and the results can be stored together with the images.

7. System Control

The NNS 650 is controlled from an MS-Windows 7 graphical user interface running at WUXGA (1920x1200) screen resolution. The system includes a 24" LCD monitor, keyboard, optical mouse and a height-adjustable office desk. A manual user interface is optionally available.

The microscope controller is dedicated to its primary function, includes a DVD/RW and has a possibility to connect directly to a LAN. Optionally, a support computer can be connected for additional PC-based functionality such as MS-Office software suite, firewall, anti-virus and other non-FEI software.

8. Correlative Workflow

Correlative Workflow is an extension for Maps Tiling & Stitching which enables the import of images from external sources (light microscopy, other SEM, SDB or TEM). It also enables the user to to correlate these imported imageswith the acquired high-resolution EM images. The external images can be used for fast navigation, stage control and for correlating the different image modalities with each other.

Correlative Workflow requires the Maps Tiling & Stitching license. It is installed on both the microscope PC as well as support PC. Correlative Workflow enables color correlation and external image import for finding regions of interests as well as correlating images acquired with data imported from external sources.

Maps Correlative Workflow requires at least 4 GB of RAM memory.

9. Maps Tiling & Stitching

Maps is a software suite for high-throughput, fully automated, image acquisition system. Maps Tiling & Stitching is the basis for other Maps packages and enables recording information from large areas in a smart way.

Maps Tiling & Stitching is capable of recording images with a pixel size up to 8k x 8k (the maximum size depends on the instrument and server software) and stitches these images together to create a distortion-free, high-resolution overview of the sample area. Maps works with all available detectors: with the high signal-yield, in-lens detectors, the super-sensitive STEM detectors, as well as with the angular selective detector on NanoSEM. FEl‘s high precision stages allow image acquisition with minimal overlap (typically a 5% overlap is sufficient for distortion-free stitching of the individual tiles). Maps is optimized for minimal process overhead and offers instant feedback during the acquisition process.

Creating large images by tiling & stitching has the following benefits:

  • Ease the demand on ambient conditions stability for stable and non-distorted image acquisition.

  • Allow user to start analyzing the data during the acquisition process.

  • Acquisition time is optimized by imaging relevant areas only 

Maps can handle microscope data in the following formats: jpeg, bmp, Tiff and png. Maps image data can be saved in RAW format, Tiff format, or in the appropriate format for visualization with Microsoft HD View.

10. Remote Access Program for interactive Diagnostics (RAPID)

This instrument is RAPID-enabled. RAPID (Remote Access Program for interactive Diagnostics) is a highly secure connectivity tool that enables FEl‘s service engineers to connect directly to the instrument to address system issues remotely. RAPID can significantly speed up repair time and thus reduce instrument downtimes, while improving FEi's overall quality of service. FEl's sen/ice engineers use RAPID to perform remote system diagnostics and repairs, support user operation and view images for enhancing system performance. However, customers maintain complete control of how and when RAPID is used -- each RAPID session must be initiated by the customer.

RAPID requires a high-speed internet connection (> 5 MB/sec recommended, 1 Mb/sec required).

11. System Support

The microscope entities the owner to free access to the on-line resources of FEI for Owners (see my.fei.com owners for details).This is a valuable resource enabling users to link to other users of FEI instruments around the world.

Main features are:

  • Learn and stay updated on new developments, microscope enhancements and applications

  • Share expertise and knowledge with peers

  • Discuss and communicate with FEI specialists